I had this error while trying OS deployment at one of the branch sites last week, I didn’t have any one to get the logs from there “will do future post for that” so I started searching for that Error code it means issue with the hash value .
here is a check list followed in tis order:
1) remove and re-distribute the content, or create the packages again.
2)Make sure there is no hidden file within any of the package source folders.
3)Make sure enable binary differential compression is enabled
4)last but not least , Changing the memory on the computer fixed the issue (it can be caused if there is RAM Fault ) if you have this issue with few number of machines try this firrst.